University of Twente Student Theses
Temperature dependencies in CMOS capacitors
Meijers, J.P. (2024) Temperature dependencies in CMOS capacitors.
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| Abstract: | In this research, the various effects that determine the capacitance and temperature stability of Metal Oxide Metal capacitors in the back end of CMOS chips have been studied. With the goal of being able to design more stable capacitors for use in high precision on-chip oscillators. By manually introducing temperature dependencies to a state- of-the-art electromagnetic solver, and solving for several tem- peratures, the relations between temperature dependencies in materials to the temperature coefficient of the capacitance have been determined. By comparing these effects to measurements, the solver can be tuned to more accurately predict capacitance and temperature coefficients of real capacitors. The results show that achieving high temperature stability in CMOS capacitors is possible, by designing the structures such that the different temperature coefficients cancel each other out. These temperature stable capacitors can be used to make high precision on-chip oscillators feasible. |
| Item Type: | Essay (Bachelor) |
| Faculty: | EEMCS: Electrical Engineering, Mathematics and Computer Science |
| Subject: | 53 electrotechnology |
| Programme: | Electrical Engineering BSc (56953) |
| Link to this item: | https://purl.utwente.nl/essays/102393 |
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