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Towards Optimal Active Vibration Isolation Co-Design for Ultra-Precise Positioning

Witteveen, Mark (2025) Towards Optimal Active Vibration Isolation Co-Design for Ultra-Precise Positioning.

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Full Text Status:Access to this publication is restricted
Embargo date:1 January 2030
Abstract:Previous research at the University of Twente has explored active vibration isolation systems; however, this study marks a transition toward implementation in a practical, real-world system. The focus is on the design of an isolation platform for a precision motion system used in the semiconductor industry, aimed at minimising position jitter, which refers to high-frequency oscillatory behaviour of the payload during standstill. This includes characterisation of the dynamic performance of the current system, identification and modelling of key disturbances, such as floor vibrations, sensor noise, and actuator dynamics, and co-design of robust controllers using combined H2/H∞ optimisation techniques.
Item Type:Essay (Master)
Clients:
PM, Dedemsvaart, Netherlands
Faculty:ET: Engineering Technology
Subject:52 mechanical engineering
Programme:Mechanical Engineering MSc (60439)
Link to this item:https://purl.utwente.nl/essays/107361
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