Hot tips for chemistry : development of a carbon nanotube based field emitter array for plasma chemistry on chip
Author(s): Groenland, A.W. (2006)
Abstract:
In this project, the feasibility of gated emitter array’s (GFEAs) as electron source for plasma chemistry in microreactors is studied. Next, a carbon nanotube (CNT) based GFEA is designed and realised in microtechnology in which noodle shaped CNTs are grown selectively on a nickel (Ni) catalytic layer in a thermal chemical vapour deposition (CVD) process
Document(s):
MSc_scriptie_Groenland.pdf