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Hot tips for chemistry : development of a carbon nanotube based field emitter array for plasma chemistry on chip

Groenland, A.W. (2006) Hot tips for chemistry : development of a carbon nanotube based field emitter array for plasma chemistry on chip.

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Abstract:In this project, the feasibility of gated emitter array’s (GFEAs) as electron source for plasma chemistry in microreactors is studied. Next, a carbon nanotube (CNT) based GFEA is designed and realised in microtechnology in which noodle shaped CNTs are grown selectively on a nickel (Ni) catalytic layer in a thermal chemical vapour deposition (CVD) process
Item Type:Essay (Master)
Clients:
BIOS/MESO Fluidics
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:https://purl.utwente.nl/essays/479
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