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The influence of in-plane miscut on the surface morphology of annealed DyScO3 (110) substrates

Poppelen, Daniël van (2012) The influence of in-plane miscut on the surface morphology of annealed DyScO3 (110) substrates.

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Abstract:The surface morphology of substrates1 is of high importance for the growth of high quality thin �lms. For the substrate material DyScO3 not all factors determining the surface morphology are known and large variations in surface morphology of similarly treated substrates are observed. In this report, the in uence of miscut on the surface morphology of annealed DyScO3 (110) substrates is investigated. The main question for research is what in uence the in-plane miscut exercises on the surface morphology of annealed DyScO3 (110) substrates. This study is executed by performing x-ray di�raction measurements on as received DyScO3 (110) substrates and atomic force microscopy measurements on DyScO3 (110) substrates after 4 hours of annealing at 1000�C. Results indicate only a marginal in uence of both polar and in-plane miscut on surface morphology, and the dominant factors explaining the observed variation in surface morphology are likely not to be directly related to the miscut.
Item Type:Essay (Bachelor)
Faculty:TNW: Science and Technology
Subject:58 process technology
Programme:Advanced Technology BSc (50002)
Link to this item:http://purl.utwente.nl/essays/62101
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