University of Twente Student Theses

Login

Design, Fabrication and Characterization of a Piezo-electric Micro Control Valve

Wu, Kai (2014) Design, Fabrication and Characterization of a Piezo-electric Micro Control Valve.

[img] PDF
3MB
Abstract:This project mainly includes two parts. The first session is about assembling a miniature piezo disk on an existing microvalve made of a SOI (Silicon on Insulator) wafer, so the valve can be actuated piezoelectrically. In order to minimize the piezo hysteresis influence, built-in capacitive displacement sensing is used during characterization of the valve behavior. The second part deals with improving the valve design for direct assembly of a piezoelectric actuator onto the valve chip, allowing for easier assembly, better performance and smaller device dimensions. This redesign consists of the new valve structure design, mask design, fabrication in the clean room and the characterization of the new valve.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/64736
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page