Micro-valve with in-plane fluidics using surface channel technology on SOI wafer for use with micro-Coriolis sensor

Meutstege, Esken (2014) Micro-valve with in-plane fluidics using surface channel technology on SOI wafer for use with micro-Coriolis sensor.

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Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:52 mechanical engineering, 53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/65065
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