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Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

Janson, T.G. (2014) Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling.

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Abstract:We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:33 physics, 50 technical science in general, 51 materials science
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/66130
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