University of Twente Student Theses


Towards a High Dynamic Range Resonant MEMS Accelerometer

Boom, B.A. (2015) Towards a High Dynamic Range Resonant MEMS Accelerometer.

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Abstract:A MEMS device was designed and produced to accurately characterize the behavior of a double-ended tuning fork transducer structure. Such a structure changes its resonance frequency under an axial load and is of interest in accurate measurement systems. Sensors with very high dynamic ranges can be obtained by using a double-ended tuning fork. Tuning fork quality factors up to 100.000 were demonstrated under high vacuum conditions, and tuning fork sensitivities up to 3MHz/N were measured. The transducer sensitivity is found to increase with a compressive axial load. This corresponds very well to analytical models that were derived for the system. In addition, the non-linear dynamics of the tuning fork are investigated. By tuning different non-linear effects, they can be shown to cancel up to at least third order. This is interesting for improving the noise performance of the tuning fork.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering MSc (60353)
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