University of Twente Student Theses


Design of Planetary System to resolve film thickness variation in Film Deposition

Roozing, G. (2015) Design of Planetary System to resolve film thickness variation in Film Deposition.

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Abstract:The main project, during the time at CTI, was to design a planetary system for the EV400 physical vapor deposition machine. The EV400 is a commercial system, operating under vacuum, and used for thin film deposition. In the lab of DMI, the display department of CTI, physical vapor machines are used for research in the areas of microelectronics and displays. In the current configuration of the E400 workpiece samples are mounted stationary on the sample holder which results in film thickness variations of about 50 percent. The whole project can be divided into three parts. Firstly, a literature study is performed to ensure a thorough understanding of film thickness variation. The following topics have been studied: - thin film deposition; - basic principles of vacuum and equipment used in vacuum (e.g. vacuum pumps, measure- ment gauges and connections); - epicyclic gearing and feedthroughs. Secondly, film thickness variation is analyzed by constructing multiple theoretical mathematical models to signify the problem. One of the main conclusions is that by using a planetary system in thin film deposition film thickness variation reduces by 80 percent, in theory. Thirdly, multiple concepts are generated, analyzed and combined which resulted in a detailed design. Throughout the project the interaction between DMI and the technicians of the workshop of CTI was fundamental for the design, development and construction of the planetary system. The interaction mainly consisted of support by providing suggestions and technical know-how.
Item Type:Internship Report (Master)
Centro de Tecnologia da Informação Renato Archer, Brazil
Faculty:ET: Engineering Technology
Subject:52 mechanical engineering
Programme:Mechanical Engineering MSc (60439)
Keywords:(thin) film deposition, film thickness variation, mathematical models, principles of vacuum, equipment in vacuum, epicyclic gearing, feedthrough
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