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Surface tension driven fabrication of three-dimensional microstructures

Sundaram, J. (2010) Surface tension driven fabrication of three-dimensional microstructures.

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Abstract:In this project we are going to fold a template made in silicon nitride using standard IC technology and fold this into three dimensional structures. Folding will be done by using the capillary forces of water drops. At first we will determine the theoretical forces working on these structures when a drop of water is placed on then, and assess whether these structures can be made to fold. And if they fold, will these structures stay folded? We will determine the folding rate and how different surface parameters will influence this rate. The structures and theroretical model are already created and determined.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:50 technical science in general
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/69504
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