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Wobbe meter : A calorific measurement system on chip

Pap, M.G. (2011) Wobbe meter : A calorific measurement system on chip.

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Abstract:With help of MEMS technology a new approach was created for the realization of an on-chip Wobbeindex metering solution. The use of MEMS technology for a metering solution gives a reduction in size and costs which can be a huge benefit for the (bio-)gas industry. The metering solution requires the integration of two devices: the micro-coriolis flow sensor and a calorific measurement sensor. The goal of this project was to do a feasibility study for a proof-of-concept of an on-chip calorific sensor which can be integrated with the existing micro-coriolis flow sensor. There were two chips designed with in total seven variations to study the behaviour of combustion inside the chip. A measurement set-up was realized which provides a flexible test-environment for the characterisation of the chip. The project delivered two new process flows: using Dupont MX5020 polymer foil for lithography on structured surfaces and applying platinum on silicon-rich nitride without an adhesion layer for high temperature micro-heaters. All the problems which were encountered during the processing were solvable and led to alternative solutions for future processing. The production in the cleanroom was not finished due to time constraints and unforeseen circumstances which did not enable us to characterize the calorific sensor. Creating a calorific sensor is deemed feasible and with the developed process-flow an integration can be realized of the calorific sensor and the micro-coriolis sensor into one device: the wobbe-meter.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/69781
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