Charge carrier transport through silicon nitride membranes and fabrication of solid-state nanopores

Wit, Erik de (2016) Charge carrier transport through silicon nitride membranes and fabrication of solid-state nanopores.

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Abstract:Solid-state nanopores can be formed using dielectric breakdown. With this technique a voltage is applied over a thin silicon-nitride membrane and the current is monitored. The current generates defects in the membrane. After a path of defects is formed through the membrane the membrane breaks down and a nanopore is formed. It is unclear whether this current is formed by electrons or protons. This research will go into the kinetics of nanopore formation and distinguish between electron and proton transport through an intact silicon-nitride membrane.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:33 physics, 51 materials science, 53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/70684
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