Acid Robust Piezoresistive Pressure Sensors

Rijk, L.M.S.J. (2017) Acid Robust Piezoresistive Pressure Sensors.

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Abstract:This thesis investigates two areas of improvement for acid robust piezoresistive pressure sensors for the automotive industry. Such sensors typically rely on a cross-linked encapsulation material, but this has been found to degrade and swell in some harsh acidic environments. Additionally, corrosion resistant conductors are required for the chip. Current designs use a proprietary noble metallization system which requires a specialised manufacturing process. Furthermore, it has been found that the accuracy can be affected due to mechanical stress. First, a non-crosslinked encapsulation material has been evaluated. It was found that such a material can provide better corrosion protection and it does not swell. Results show that it has potential to meet all the requirements for the sensor and is capable of higher pressure than the current material. Second, polysilicon has been studied as an alternative conductor for the chip. Layers of boron doped polysilicon and silicon nitride were fabricated on a silicon wafer in a straight-forward manner. The acid robustness has been tested, and the sheet resistance and gold wire bond contact has been characterised with successful results.
Item Type:Essay (Master)
Clients:
Sensata Technologies, Hengelo, Netherlands
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:30 exact sciences in general, 33 physics, 50 technical science in general, 51 materials science, 53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/71832
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