Improved capacitive readout for a Coriolis mass flow sensor

The phase shift between the two capacitive readouts of a Coriolis mass flow sensor is proportional to the mass flow. A novel approach for increasing the sensitivity of this sensor is to partially cancel the actuation signal component in the readout, thereby achieving a larger phase shift for the same flow rate. The purpose of this research is to characterize the change in sensitivity resulting from the improved capacitive readout.