Modelling and Characterization of an Integrated Permittivity Sensor

A model of an integrated microfluidic device was fabricated in the MESA+ cleanroom of University of Twente. This device contains several sensors embedded in it, one of them being the relative permittivity sensor. The sensor’s behaviour can be understood by performing simulations of it. An optimized design was proposed from the simulation results. After performing the simulations, the behaviour of the sensor was verified. The results of the measurements shows that the sensor did not perform as predicted by the simulations thus several suggestions are presented.