The Pressure Dependency of a Micro Coriolis Mass Flow Sensor

In this paper the influence of pressure and gas flow on a micro Coriolis mass flow sensor will be investigated. The cross sectional shape of this tube is not perfectly circular, which causes the tube to bend under pressure. How much this tube bends and in what direction will be investigated. This will be done by simulating, doing measurements with a white light interferometer and a laser Doppler vibrometer under different pressures and flows. It is found that the channel bends upward due to pressure with 0.55μm/bar.