University of Twente Student Theses
Developing an innovative contact dynamics testing setup
Os, J.C. den (2024) Developing an innovative contact dynamics testing setup.
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| Abstract: | In order to improve the coherency between the current numerical models used by ASML and the constructed lithography machines, an experimental framework to extract relevant contact proper ties is constructed. The designed experimental setup is unique due to the ability to measure custom designed surface areas up to 1500 mm2, while being able to apply a multitude of loading condi tions. By adding a custom data filtering scheme, for each loading condition the contact properties of a flat on flat contact can be determined. The experimental data are used to conduct a comparative study, where the effects of contact pressure, contact surface area, tangential loading conditions on the contact stiffness, dissipated energy and friction coefficient is investigated. The trends observed correspond with theory found in literature, and the origin of the multiple trends within contact stiff ness, friction coefficient and dissipated energy is discussed. In conclusion, this research showed the development of a contact dynamics testing setup, which by means of experimental data analysis is able to extract the contact properties of comparatively large contact surfaces. To further increase the accuracy of the testing device, iterations with regards to the contact alignment and load delivery should be performed. |
| Item Type: | Essay (Master) |
| Clients: | ASML |
| Faculty: | ET: Engineering Technology |
| Subject: | 52 mechanical engineering |
| Programme: | Mechanical Engineering MSc (60439) |
| Link to this item: | https://purl.utwente.nl/essays/99935 |
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