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Design of a capacitive based closed-loop displacement sensor

Schabbink, Johan (2008) Design of a capacitive based closed-loop displacement sensor.

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Abstract:MEMS is the acronym for Micro Electro Mechanical Systems. The term MEMS-devices refers to parts or systems like: sensor, actuator, micro-fluidic systems and mechanical mechanisms. The typical feature size is around micrometers, while the overall device dimension is in the range of millimetre. These devices are typically manufactured using lithography based processing, alike the semiconductor processes. Due to the large area to volume ratio, electrostatic forces rule over inertia and mass, giving electrostatic forces in MEMS a practical application. Capacitive based sensing is a method to measure a displacement by means of an electromagnetic field enclosed between two or more electric guiding plates. For common capacitive based sensing the capacitance change due to a displacement, which can be measured. The application of electrostatic forces is generally used for actuation, less common the electrostatic force is used for displacement sensing. This type of displacement sensing however is used in this research.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:54 computer science
Programme:Computer Science MSc (60300)
Link to this item:http://purl.utwente.nl/essays/58308
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