Design and Fabrication of a MEMS-Based Paramagnetic Oxygen Sensor

The paramagnetic properties of oxygen can be used in sensors to measure the oxygen percentage. MEMS technology could improve conventional paramagnetic oxygen sensors in miniaturisation and fabrication costs. In this thesis assignment, two concepts based on the deflection of flow and magnetic wind have been fabricated in the cleanroom and tested. To this end, a theoretical basis is made for paramagnetic FEM simulations and flow sensor design. Testing of both sensors strongly indicates an oxygen responsivity. There is, however, signal pollution by flow rate sensitivity and yet to be identified sources. Further understanding of the sensor and adjustments to the sensor design are required to accurately measure the oxygen concentration.