Towards Optimal Active Vibration Isolation Co-Design for Ultra-Precise Positioning

Previous research at the University of Twente has explored active vibration isolation systems; however, this study marks a transition toward implementation in a practical, real-world system. The focus is on the design of an isolation platform for a precision motion system used in the semiconductor industry, aimed at minimising position jitter, which refers to high-frequency oscillatory behaviour of the payload during standstill. This includes characterisation of the dynamic performance of the current system, identification and modelling of key disturbances, such as floor vibrations, sensor noise, and actuator dynamics, and co-design of robust controllers using combined H2/H∞ optimisation techniques.