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Design of an Inclining Probe Station for MEMS Accelerometer Testing

Rajantie Tuñon, O.A.S. (2024) Design of an Inclining Probe Station for MEMS Accelerometer Testing.

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Abstract:Micro-electromechanical system (MEMS) accelerometers are small devices measuring acceleration. Current testing practices are not sufficient to completely test MEMS accelerometers. The acceleration measuring of the devices can be tested by inclining them. Requirements for a probe station to test MEMS accelerometers are defined, and a novel design of a probe station to test acceleration measuring, incorporating an inclining function, is designed. The feasibility of the design is validated by comparing it with alternative options and analyzing dynamic effects.
Item Type:Essay (Bachelor)
Clients:
Innoseis Sensor Technologies, Amsterdam, Netherlands
Faculty:ET: Engineering Technology
Subject:52 mechanical engineering
Programme:Mechanical Engineering BSc (56966)
Link to this item:https://purl.utwente.nl/essays/102238
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