Self-powered Vibration Control using Piezoelectric Materials in High Precision Machines

Abdelmoeti, Samer (2017) Self-powered Vibration Control using Piezoelectric Materials in High Precision Machines.

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Abstract:In this work, a specific vibration control application within a high precision lithography machine is considered. Vibration control could be achieved by damping enhancement which is a typical approach for lightly damped structures. Damping could be introduced passively using tuned mass dampers or viscoelastic materials, however, volume and heat generation impose application limitations. Piezoelectric materials are compact electromechanical transducers which can by actuation and sensing, or simply transduction, achieve vibration damping either through passive shunting or active feedback. Passive shunting typically require huge inductance values which can only be simulated using active circuits. This leads to the fact that both passive shunting and active feedback using piezoelectric materials require power for operation. Implementing a powered damping approach in high precision machines is practically challenging in terms of connecting physical power wiring to each flexible structure. Therefore, overcoming power limitations is necessary for piezoelectric based damping to compete with other standalone damping approaches. There exist techniques in the literature for autonomous/self-powered damping using piezoelectric materials which utilize the vibration energy as a source of power. However, these are not feasible in high precision applications considering the limited energy of the nano/micro-meter scale vibrations. This work aims to achieve vibration damping of scanning blades within a lithography machine using embedded piezoelectric materials in a self-powered approach which is applicable to low level vibrations. This report is structured as follows. The analysis, design, and results chapters are reported in the following research paper. Afterwards, the conclusion and recommendations are presented
Item Type:Essay (Master)
ASML, Veldhoven, Netherlands
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:50 technical science in general
Programme:Systems and Control MSc (60359)
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