University of Twente Student Theses
ATR-IR microreactor with ultra fast integrated microvalves for heterogeneous catalytic analysis in the microsecond domain
Haverkate, R. (2018) ATR-IR microreactor with ultra fast integrated microvalves for heterogeneous catalytic analysis in the microsecond domain.
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| Abstract: | A strongly improved sampling rate for infrared (IR) spectroscopy enables for the first time measurements in the timescale of the reaction kinetics. To enable heterogeneous catalytic analysis a platform is needed that has sufficient speed and control over its mass transport to take advantage of this increased resolution. In this paper we present a reactor chamber platform consisting of a chip with more than 5000 electrostatic actuated microvalves and a chamber volume of less than 1 µL. This platform has a maximum operation temperature of 450 ◦C and can work under a pressure up to 10 bar to gain control over its mass transport and enhance the detectability of gases. Theoretical analysis showed a total gas transition time of less than 200 µs and therefore measurements to the reaction kinetics in the microsecond domain become possible. keywords: heterogeneous catalysis, microfluidics, mass transport, attenuated total reflection infrared spectroscopy, electrostatic microvalves, micro fabrication, microelectromechanical systems, sacrificial layer etching, trench filling |
| Item Type: | Essay (Master) |
| Faculty: | EEMCS: Electrical Engineering, Mathematics and Computer Science |
| Subject: | 33 physics, 35 chemistry, 50 technical science in general, 51 materials science, 52 mechanical engineering, 53 electrotechnology |
| Programme: | Electrical Engineering MSc (60353) |
| Link to this item: | https://purl.utwente.nl/essays/76566 |
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