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ATR-IR microreactor with ultra fast integrated microvalves for heterogeneous catalytic analysis in the microsecond domain

Haverkate, R. (2018) ATR-IR microreactor with ultra fast integrated microvalves for heterogeneous catalytic analysis in the microsecond domain.

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Abstract:A strongly improved sampling rate for infrared (IR) spectroscopy enables for the first time measurements in the timescale of the reaction kinetics. To enable heterogeneous catalytic analysis a platform is needed that has sufficient speed and control over its mass transport to take advantage of this increased resolution. In this paper we present a reactor chamber platform consisting of a chip with more than 5000 electrostatic actuated microvalves and a chamber volume of less than 1 µL. This platform has a maximum operation temperature of 450 ◦C and can work under a pressure up to 10 bar to gain control over its mass transport and enhance the detectability of gases. Theoretical analysis showed a total gas transition time of less than 200 µs and therefore measurements to the reaction kinetics in the microsecond domain become possible. keywords: heterogeneous catalysis, microfluidics, mass transport, attenuated total reflection infrared spectroscopy, electrostatic microvalves, micro fabrication, microelectromechanical systems, sacrificial layer etching, trench filling
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:33 physics, 35 chemistry, 50 technical science in general, 51 materials science, 52 mechanical engineering, 53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:http://purl.utwente.nl/essays/76566
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