University of Twente Student Theses


Low voltage high performance silicon nitride EOF pump

Kooijman, Lucas Johannes (2019) Low voltage high performance silicon nitride EOF pump.

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Abstract:This is the master thesis of a project in which a high flow and high pressure SiO2 covered SiN nanopore membrane EOF pump and its production process flow have been designed and created. The pump consists of a 1 cm square chip with 37 100 µm square membranes which have been created by sacrificial moulding. The moulds are created using a novel technique for creating high density high aspect ratio nanopillars in Si. The current pump-design has a measured maximum pressure strength of 180 kPa. Based on the flow measurements it shows that this pressure can reached at a calculated potential of just 1.36 V over the membrane with a calculated maximum flow rate of 40.7 ml/min or 686 µl/s for a 0.2M K2HPO4-KH2PO4 solution at a pH between 7 and 8.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:50 technical science in general, 51 materials science, 53 electrotechnology
Programme:Electrical Engineering MSc (60353)
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