University of Twente Student Theses


Modular low noise readout method for a high-bandwidth MEMS force sensor

Valentijn, J.J. (2022) Modular low noise readout method for a high-bandwidth MEMS force sensor.

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Abstract:A method to read out a high-bandwidth force sensor using an instrumentation amplifier is presented. A sensor based on piezoresistive readout connected to a force sensing beam has been developed with a bandwidth of 75 kHz. With the goal to read out the force upon impact of tiny droplets of liquid to study needle-free injection methods. To read out the sensor, a method has been designed to take advantage of the high sensitivity and high-bandwidth. This method uses a modular PCB on which the sensor is attached. This gives the ability to quickly replace it. The high bandwidth is achieved with an amplifier with a bandwidth of 2.8 MHz. The measurement setup including, PCB, sensor and digitizer had an accuracy of 200 μN. With this new method multiple versions of the force sensor have been characterized. A maximum sensitivity of 1.669 N-1 is found and a maximum range of 13.5 mN. Comparing to previous results, a small improvement in sensor characteristics can be observed. In addition to this it can be used for other low force and high bandwidth measurement applications
Item Type:Essay (Bachelor)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering BSc (56953)
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