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Adaptive Feedforward Control for Active Vibration Isolation Systems with Motion Stage and Nonlinear Dynamics

Grootkarzijn, R. (2023) Adaptive Feedforward Control for Active Vibration Isolation Systems with Motion Stage and Nonlinear Dynamics.

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Abstract:High precision systems are critical in many scientific and engineering fields. Systems like this are subject to disturbances that limit their performance. To attenuate these disturbances, the critical payload is typically suspended to the floor by means of a vibration isolation system. The performance of passive systems is characterized by two tradeoffs. The first is expressed in terms of the suspension frequency, where low suspension frequency gives good attenuation of floor vibrations but high sensitivity to direct disturbance forces. The second tradeoff is characterized by the relative damping, where increasing the relative damping at the suspension frequency will decrease high frequency indirect disturbance rejection. Active vibration isolation systems (AVIS) have shown to mitigate the effects of these tradeoffs. This thesis presents a structured method for deriving the equations of motion of an AVIS with motion stage. The equations of motion are used to construct the disturbance feedforward controllers in a mixed feedback/feedforward control strategy. An adaptive algorithm in the form of a filtered-error Kalman approach is proposed and implemented. The control strategy is tested in a simulation environment and implemented on an experimental setup. Substantial performance improvement was observed with respect to the passive and feedback controlled system.
Item Type:Essay (Master)
Faculty:ET: Engineering Technology
Subject:31 mathematics, 33 physics, 52 mechanical engineering
Programme:Systems and Control MSc (60359)
Link to this item:https://purl.utwente.nl/essays/95120
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